設備名稱 Equipment Name

管式二合一PECVD設備  Horizontal PECVD (Two-In-One)

設備型號 Equipment Model

PD-520/PD-520L/PD-520MAX

設備用途 Equipment Application

AlO+SiN薄膜沉積。

AlOx+SiN deposition.

技術特點  Features

1、AlOx+SiN二合一同管完成，減少工藝環(huán)節(jié)，有效提升良率、降低碎片率。

The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  

2、單機產能優(yōu)越的二合一配置方案。
Optimal throughout solution: two-in-one configuration. 

設備參數(shù)  Parameters